标题： 弹性中红外激光光散射在微电子学无损检测中的应用 显示英文标题

标题： Application of elastic mid-IR-laser-light scattering for non-destructive inspection in microelectronics

摘要： 低角度中红外光散射技术的一些可能应用以及基于该技术最近开发的一些方法，用于半导体材料和结构的无损检测和研究在论文中进行了讨论。 结论认为，这些技术可能对于解决研究实验室和微电子工业中关于缺陷分析和质量监控的大量问题非常有用。 显示英文摘要

摘要： Some possible applications of the low-angle mid-IR-light scattering technique and some recently developed on its basis methods for non-destructive inspection and investigation of semiconductor materials and structures are discussed in the paper. The conclusion is made that the techniques in question might be very useful for solving a large number of problems regarding defect investigations and quality monitoring both in research laboratories and the industry of microelectronics