标题： 单晶金刚石纳米机械谐振器，品质因数超过一百万 显示英文标题

标题： Single-Crystal Diamond Nanomechanical Resonators with Quality Factors exceeding one Million

摘要： 我们展示了厚度低至85纳米的单晶金刚石悬臂梁的纳米制造和机械测量，厚度均匀性优于20纳米，横向尺寸可达240微米。在室温下发现品质因数超过一百万，比类似尺寸的最先进的单晶硅悬臂梁高出一个数量级。在毫开尔文温度下，最佳悬臂梁的力灵敏度为几百zeptonewtons。因此，单晶金刚石可通过简单的共振器材料替换直接改进现有的力和质量传感器，并导致具有极低能量耗散的量子纳米机械装置。 显示英文摘要

摘要： We present nanofabrication and mechanical measurements of single-crystal diamond cantilevers with thickness down to 85 nm, thickness uniformity better than 20 nm, and lateral dimensions up to 240 um. Quality factors exceeding one million are found at room temperature, surpassing those of state-of-the-art single-crystal silicon cantilevers of similar dimensions by roughly an order of magnitude. Force sensitivities of a few hundred zeptonewtons result for the best cantilevers at millikelvin temperatures. Single-crystal diamond could thus directly improve existing force and mass sensors by a simple substitution of resonator material, and lead to quantum nanomechanical devices with exceptionally low energy dissipation.